Superconducting microwire detectors based on WSi with single-photon sensitivity in the near-infrared

Abstract

'Jason P. Allmaras' 'Boris Korzh' 'Matthew D. Shaw' 'Jeffrey M. Shainline' 'Richard P. Mirin' 'S. W. Nam'] We report on the fabrication and characterization of single-photon-sensitive WSi superconducting detectors with wire widths from 1 µm to 3 µm. The devices achieve saturated internal detection efficiency at 1.55 µm wavelength and exhibit maximum count rates in excess of 105 s -1. We also investigate the material properties of the silicon-rich WSi films used for these devices. We find that many devices with active lengths of several hundred microns exhibit critical currents in excess of 50% of the depairing current. A meandered detector with 2.0 µm wire width is demonstrated over a surface area of 362 × 362 µm2 , showcasing the material and device quality achieved.